![]() An electrical characterization of fabricated MEMS cantilever is done to obtain the experimental value of pull-in voltage. It utilizes the methodology based on nonlinear electrostatic pressure approximated by its linearized uniform counterpart and mechanical force-deflection model. To arrive at equivalence, an analytical formulation for spring constant and pull-in voltage of cantilever based on the partial load distribution and curling is derived. Such macro model can be easily implemented in any circuit simulation platform and be used to demonstrate the possible advantage of using this scheme for device and system dynamics optimization. This electrical model is capable of predicting the device characteristic behaviour before the onset of pull-in instability region and estimates pull-in voltage. A methodology to derive electromechanical coupling as a function of bias voltage is developed. In order to model device mechanics, analytical formulations are done and calculations are adapted to macro model. It consists of linear electrical components and nonlinear dependent sources, which represent mechanical parameters and electromechanical coupling in the system. This paper proposes development of an electromechanical coupling macro model of electrostatically actuated MEMS cantilever for straight and curled beam configurations. It is important to build its macro model for rapid system design and simulation. These devices are usually interfaced with electronic circuits. The deployment of MicroElectroMechanical System (MEMS) cantilever in the electronic systems is continuously increasing. Additional complex behaviors can be introduced to this network model if it is required. This model is also used to predict the performance of this device as a microphone, coupling it to a two-stage charge amplifier. The obtained waveforms show good agreement with the amplitude and distortion that was reported both in the transient FEM simulations and in the experimental measurements. As an application example, the parameters of the model were fitted to emulate the behavior of an electrostatic MEMS loudspeaker whose finite-element (FEM) simulations and acoustic characterisation where already reported in the literature. The simulation of a displacement-dependent capacitor and a nonlinear spring is accomplished with arbitrary behavioral sources, which are a standard component of circuit simulators. ![]() Effects such as stress-stiffening and pull-in are accounted for. This article presents a circuit model that is able to capture the full nonlinear behavior of an asymmetric electrostatic transducer whose dynamics are governed by a single degree of freedom.
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